Synthesis, Characterization and Photocrosslinking of Negative Photoresist Polymers
Keywords:
Thiadiazole, Polymer, Photoresist, Negative, PhotocrosslinkingAbstract
In this study, a new polymers (8) and (13) that contain 1,2,3-Thiadiazole or 1,2,3-
Selenadiazole heterocyclic rings in the side chains from the reaction of the commercial
available Polymer (Poly[4-hydroxystyrene]) with substituted 1,2,3-Thiadiazole or 1,2,3-
Selenadiazole were prepared.
The 1,2,3-Thiadiazole and 1,2,3-Selenadiazole heterocyclic rings in the side chains of
the polymers are able to undergo cycloaddition reaction with evolution of nitrogen, when
treated with UV- light either in solution or as thin films. These reactions were followed up by
using spectroscopic techniques like (UV-Visible and Infrared) spectroscopy.
The decrease of the absorption peaks in the UV-spectra and the emission peaks in the
IR-spectra that are characteristic of the 1,2,3-Thiadiazoles and of the 1,2,3-Selenadiazoles is
followed.
The crosslinking reactions of the polymers were carried out in solution and as a thin film
through irradiation with UV-lamp λmax=294 light source (150 watt). These compounds
showed an importance in microlithography, manufacturing of electronic devices and in
pharmacological uses as antibacterial and fungus because they contain 1,2,3-Thiadiazole and
1,2,3-Selenadiazole heterocyclic rings.